Flow Range:0–15 SLPM
Accuracy:±(1.5% of reading + 0.5% of full scale)
Repeatability:±0.5% of full scale
Flow Range:0 - 2000 sccm
Accuracy:±(2.0 + 0.5FS)%
Range Ratio:100:1
Measurement Range:0–2 SLPM (Standard Liter per Minute)
Accuracy:±(1.5% + 0.2% F.S.)
Repeatability:±0.25%
Measurement Range:0–50 SLPM
Accuracy:±(2.0% + 0.5% F.S.)
Repeatability:±0.75%
Measurement Range:0–500 SLPM
Accuracy:±1.5% of Full Scale (F.S.)
Repeatability:±0.75%
Measurement Range:0 - 800 SLPM
Accuracy Grade:1.5% F.S
Nominal Diameter:19mm
힘:11.4 ~ 25.2v
범위:0.5 ~ 10,1.8 ~ 32,5 ~ 85,9 ~ 150L/분
정확도 전체 범위:x ± 1% (<50% 범위)
흐름 범위:0 ~ 2000 ... 6000
정확성:± (2.0+0.5fs)%
턴 다운 비율:> 100 : 1
에 사용되는:건조 가스
범위:+/- 200cm/분
정확성:0.35%
Monitoring scope:500sccm
Accuracy:0.5%
Output voltage:4.5V
제로 포인트 출력 드리프트:+30 MV
출력 드리프트:+0.12 %/OC
일한 전력 공급:8-18VDC, 100MA
경로 (N):2.3. 4. 5
유동률:10, 20, 30, 40, 50 slpm
범위 비율:100:1